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FastCap is a three-dimensional capacitance extraction program.

FastCap computes self and mutual capacitances between ideal 
conductors of arbitrary shapes, orientations and sizes.  
The conductors can be embedded in a dielectric region composed
of any number of constant-permittivity regions of any shape and
size.

The algorithm used in FastCap is an acceleration of the
boundary-element technique for solving the integral equation 
associated with the multiple-conductor, multiple-dielectric
capacitance extraction problem.  The linear system resulting
from the boundary-element discretization is solved using a
generalized conjugate residual algorithm with a fast multipole
algorithm to efficiently compute the iterates.

FastCap was written at MIT by the MIT RLE VLSI-CAD research
group (http://rle-vlsi.mit.edu/).